JPS5095003A - - Google Patents

Info

Publication number
JPS5095003A
JPS5095003A JP88374A JP88374A JPS5095003A JP S5095003 A JPS5095003 A JP S5095003A JP 88374 A JP88374 A JP 88374A JP 88374 A JP88374 A JP 88374A JP S5095003 A JPS5095003 A JP S5095003A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP88374A
Other languages
Japanese (ja)
Other versions
JPS5623144B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP88374A priority Critical patent/JPS5623144B2/ja
Publication of JPS5095003A publication Critical patent/JPS5095003A/ja
Publication of JPS5623144B2 publication Critical patent/JPS5623144B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
JP88374A 1973-12-24 1973-12-24 Expired JPS5623144B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP88374A JPS5623144B2 (enrdf_load_stackoverflow) 1973-12-24 1973-12-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP88374A JPS5623144B2 (enrdf_load_stackoverflow) 1973-12-24 1973-12-24

Publications (2)

Publication Number Publication Date
JPS5095003A true JPS5095003A (enrdf_load_stackoverflow) 1975-07-29
JPS5623144B2 JPS5623144B2 (enrdf_load_stackoverflow) 1981-05-29

Family

ID=11486057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP88374A Expired JPS5623144B2 (enrdf_load_stackoverflow) 1973-12-24 1973-12-24

Country Status (1)

Country Link
JP (1) JPS5623144B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5744143A (en) * 1980-08-29 1982-03-12 Tokyo Ohka Kogyo Co Ltd Composition and method for forming micropattern

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5744143A (en) * 1980-08-29 1982-03-12 Tokyo Ohka Kogyo Co Ltd Composition and method for forming micropattern

Also Published As

Publication number Publication date
JPS5623144B2 (enrdf_load_stackoverflow) 1981-05-29

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