JPS5093772A - - Google Patents
Info
- Publication number
- JPS5093772A JPS5093772A JP14237373A JP14237373A JPS5093772A JP S5093772 A JPS5093772 A JP S5093772A JP 14237373 A JP14237373 A JP 14237373A JP 14237373 A JP14237373 A JP 14237373A JP S5093772 A JPS5093772 A JP S5093772A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14237373A JPS5093772A (en(2012)) | 1973-12-21 | 1973-12-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14237373A JPS5093772A (en(2012)) | 1973-12-21 | 1973-12-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5093772A true JPS5093772A (en(2012)) | 1975-07-26 |
Family
ID=15313859
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14237373A Pending JPS5093772A (en(2012)) | 1973-12-21 | 1973-12-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5093772A (en(2012)) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5249770A (en) * | 1975-10-20 | 1977-04-21 | Toshiba Corp | Pattern inspection device |
| JPS58159342A (ja) * | 1982-03-17 | 1983-09-21 | Mitsubishi Electric Corp | 半導体素子のパタ−ン欠陥検出方法 |
-
1973
- 1973-12-21 JP JP14237373A patent/JPS5093772A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5249770A (en) * | 1975-10-20 | 1977-04-21 | Toshiba Corp | Pattern inspection device |
| JPS58159342A (ja) * | 1982-03-17 | 1983-09-21 | Mitsubishi Electric Corp | 半導体素子のパタ−ン欠陥検出方法 |