JPS5093293A - - Google Patents
Info
- Publication number
- JPS5093293A JPS5093293A JP49000162A JP16274A JPS5093293A JP S5093293 A JPS5093293 A JP S5093293A JP 49000162 A JP49000162 A JP 49000162A JP 16274 A JP16274 A JP 16274A JP S5093293 A JPS5093293 A JP S5093293A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Formation Of Insulating Films (AREA)
- Non-Volatile Memory (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP74162A JPS5442347B2 (ja) | 1973-12-22 | 1973-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP74162A JPS5442347B2 (ja) | 1973-12-22 | 1973-12-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5093293A true JPS5093293A (ja) | 1975-07-25 |
| JPS5442347B2 JPS5442347B2 (ja) | 1979-12-13 |
Family
ID=11466331
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP74162A Expired JPS5442347B2 (ja) | 1973-12-22 | 1973-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5442347B2 (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5419434A (en) * | 1977-07-14 | 1979-02-14 | Shinei Netsukeisou Kk | Steel surface hardening treatment |
| JPS5637633A (en) * | 1979-09-03 | 1981-04-11 | Mitsubishi Electric Corp | Formation of oxide film |
| JPH03161927A (ja) * | 1989-11-21 | 1991-07-11 | Oki Electric Ind Co Ltd | プラズマエッチング方法及びプラズマエッチング装置 |
| JPH05243577A (ja) * | 1992-02-26 | 1993-09-21 | Seiko Epson Corp | 薄膜トランジスタの製造方法 |
-
1973
- 1973-12-22 JP JP74162A patent/JPS5442347B2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5419434A (en) * | 1977-07-14 | 1979-02-14 | Shinei Netsukeisou Kk | Steel surface hardening treatment |
| JPS5637633A (en) * | 1979-09-03 | 1981-04-11 | Mitsubishi Electric Corp | Formation of oxide film |
| JPH03161927A (ja) * | 1989-11-21 | 1991-07-11 | Oki Electric Ind Co Ltd | プラズマエッチング方法及びプラズマエッチング装置 |
| JPH05243577A (ja) * | 1992-02-26 | 1993-09-21 | Seiko Epson Corp | 薄膜トランジスタの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5442347B2 (ja) | 1979-12-13 |