JPS5093275A - - Google Patents
Info
- Publication number
- JPS5093275A JPS5093275A JP14354173A JP14354173A JPS5093275A JP S5093275 A JPS5093275 A JP S5093275A JP 14354173 A JP14354173 A JP 14354173A JP 14354173 A JP14354173 A JP 14354173A JP S5093275 A JPS5093275 A JP S5093275A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14354173A JPS5093275A (ja) | 1973-12-24 | 1973-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14354173A JPS5093275A (ja) | 1973-12-24 | 1973-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5093275A true JPS5093275A (ja) | 1975-07-25 |
Family
ID=15341138
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14354173A Pending JPS5093275A (ja) | 1973-12-24 | 1973-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5093275A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5265183A (en) * | 1975-11-26 | 1977-05-30 | Matsushita Electric Ind Co Ltd | Production process of thin film of compounds |
-
1973
- 1973-12-24 JP JP14354173A patent/JPS5093275A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5265183A (en) * | 1975-11-26 | 1977-05-30 | Matsushita Electric Ind Co Ltd | Production process of thin film of compounds |