JPS509268A - - Google Patents
Info
- Publication number
- JPS509268A JPS509268A JP5982973A JP5982973A JPS509268A JP S509268 A JPS509268 A JP S509268A JP 5982973 A JP5982973 A JP 5982973A JP 5982973 A JP5982973 A JP 5982973A JP S509268 A JPS509268 A JP S509268A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5982973A JPS509268A (de) | 1973-05-30 | 1973-05-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5982973A JPS509268A (de) | 1973-05-30 | 1973-05-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS509268A true JPS509268A (de) | 1975-01-30 |
Family
ID=13124493
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5982973A Pending JPS509268A (de) | 1973-05-30 | 1973-05-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS509268A (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5376139A (en) * | 1976-12-17 | 1978-07-06 | Ibm | Silicon etch component |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4838675B1 (de) * | 1969-10-22 | 1973-11-19 |
-
1973
- 1973-05-30 JP JP5982973A patent/JPS509268A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4838675B1 (de) * | 1969-10-22 | 1973-11-19 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5376139A (en) * | 1976-12-17 | 1978-07-06 | Ibm | Silicon etch component |
JPS5550112B2 (de) * | 1976-12-17 | 1980-12-16 |