JPS509198A - - Google Patents

Info

Publication number
JPS509198A
JPS509198A JP48060699A JP6069973A JPS509198A JP S509198 A JPS509198 A JP S509198A JP 48060699 A JP48060699 A JP 48060699A JP 6069973 A JP6069973 A JP 6069973A JP S509198 A JPS509198 A JP S509198A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48060699A
Other languages
Japanese (ja)
Other versions
JPS5628630B2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6069973A priority Critical patent/JPS5628630B2/ja
Publication of JPS509198A publication Critical patent/JPS509198A/ja
Publication of JPS5628630B2 publication Critical patent/JPS5628630B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)
JP6069973A 1973-05-30 1973-05-30 Expired JPS5628630B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6069973A JPS5628630B2 (cs) 1973-05-30 1973-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6069973A JPS5628630B2 (cs) 1973-05-30 1973-05-30

Publications (2)

Publication Number Publication Date
JPS509198A true JPS509198A (cs) 1975-01-30
JPS5628630B2 JPS5628630B2 (cs) 1981-07-03

Family

ID=13149790

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6069973A Expired JPS5628630B2 (cs) 1973-05-30 1973-05-30

Country Status (1)

Country Link
JP (1) JPS5628630B2 (cs)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56106646A (en) * 1980-01-31 1981-08-25 Tokyo Shibaura Electric Co Laser knife for operation
JPS59193783A (ja) * 1983-04-18 1984-11-02 Mitsubishi Electric Corp パイプ切断装置
JPS60177987A (ja) * 1984-02-24 1985-09-11 Agency Of Ind Science & Technol レ−ザ加工装置
JPS6126878U (ja) * 1984-07-24 1986-02-18 金剛株式会社 組立式収容室

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4659300B2 (ja) 2000-09-13 2011-03-30 浜松ホトニクス株式会社 レーザ加工方法及び半導体チップの製造方法
JP4663952B2 (ja) * 2000-09-13 2011-04-06 浜松ホトニクス株式会社 レーザ加工装置及びレーザ加工方法
EP2400539B1 (en) 2002-03-12 2017-07-26 Hamamatsu Photonics K.K. Substrate dividing method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56106646A (en) * 1980-01-31 1981-08-25 Tokyo Shibaura Electric Co Laser knife for operation
JPS59193783A (ja) * 1983-04-18 1984-11-02 Mitsubishi Electric Corp パイプ切断装置
JPS60177987A (ja) * 1984-02-24 1985-09-11 Agency Of Ind Science & Technol レ−ザ加工装置
JPS6126878U (ja) * 1984-07-24 1986-02-18 金剛株式会社 組立式収容室

Also Published As

Publication number Publication date
JPS5628630B2 (cs) 1981-07-03

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