JPS5091287A - - Google Patents
Info
- Publication number
- JPS5091287A JPS5091287A JP13777073A JP13777073A JPS5091287A JP S5091287 A JPS5091287 A JP S5091287A JP 13777073 A JP13777073 A JP 13777073A JP 13777073 A JP13777073 A JP 13777073A JP S5091287 A JPS5091287 A JP S5091287A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13777073A JPS5091287A (enExample) | 1973-12-12 | 1973-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13777073A JPS5091287A (enExample) | 1973-12-12 | 1973-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5091287A true JPS5091287A (enExample) | 1975-07-21 |
Family
ID=15206412
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13777073A Pending JPS5091287A (enExample) | 1973-12-12 | 1973-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5091287A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57167653A (en) * | 1981-03-23 | 1982-10-15 | Fujitsu Ltd | Manufacture of semiconductor device |
-
1973
- 1973-12-12 JP JP13777073A patent/JPS5091287A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57167653A (en) * | 1981-03-23 | 1982-10-15 | Fujitsu Ltd | Manufacture of semiconductor device |