JPS5091275A - - Google Patents
Info
- Publication number
- JPS5091275A JPS5091275A JP13778173A JP13778173A JPS5091275A JP S5091275 A JPS5091275 A JP S5091275A JP 13778173 A JP13778173 A JP 13778173A JP 13778173 A JP13778173 A JP 13778173A JP S5091275 A JPS5091275 A JP S5091275A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13778173A JPS5091275A (en:Method) | 1973-12-12 | 1973-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13778173A JPS5091275A (en:Method) | 1973-12-12 | 1973-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5091275A true JPS5091275A (en:Method) | 1975-07-21 |
Family
ID=15206679
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13778173A Pending JPS5091275A (en:Method) | 1973-12-12 | 1973-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5091275A (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6450316U (en:Method) * | 1987-09-24 | 1989-03-28 |
-
1973
- 1973-12-12 JP JP13778173A patent/JPS5091275A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6450316U (en:Method) * | 1987-09-24 | 1989-03-28 |