JPS5090330A - - Google Patents

Info

Publication number
JPS5090330A
JPS5090330A JP48136803A JP13680373A JPS5090330A JP S5090330 A JPS5090330 A JP S5090330A JP 48136803 A JP48136803 A JP 48136803A JP 13680373 A JP13680373 A JP 13680373A JP S5090330 A JPS5090330 A JP S5090330A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48136803A
Other languages
Japanese (ja)
Other versions
JPS52376B2 (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48136803A priority Critical patent/JPS52376B2/ja
Publication of JPS5090330A publication Critical patent/JPS5090330A/ja
Publication of JPS52376B2 publication Critical patent/JPS52376B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Drying Of Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP48136803A 1973-12-10 1973-12-10 Expired JPS52376B2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48136803A JPS52376B2 (cg-RX-API-DMAC10.html) 1973-12-10 1973-12-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48136803A JPS52376B2 (cg-RX-API-DMAC10.html) 1973-12-10 1973-12-10

Publications (2)

Publication Number Publication Date
JPS5090330A true JPS5090330A (cg-RX-API-DMAC10.html) 1975-07-19
JPS52376B2 JPS52376B2 (cg-RX-API-DMAC10.html) 1977-01-07

Family

ID=15183869

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48136803A Expired JPS52376B2 (cg-RX-API-DMAC10.html) 1973-12-10 1973-12-10

Country Status (1)

Country Link
JP (1) JPS52376B2 (cg-RX-API-DMAC10.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52155531A (en) * 1976-06-17 1977-12-24 Motorola Inc Dry photo resist developing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52155531A (en) * 1976-06-17 1977-12-24 Motorola Inc Dry photo resist developing method

Also Published As

Publication number Publication date
JPS52376B2 (cg-RX-API-DMAC10.html) 1977-01-07

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