JPS5090041A - - Google Patents
Info
- Publication number
- JPS5090041A JPS5090041A JP13888973A JP13888973A JPS5090041A JP S5090041 A JPS5090041 A JP S5090041A JP 13888973 A JP13888973 A JP 13888973A JP 13888973 A JP13888973 A JP 13888973A JP S5090041 A JPS5090041 A JP S5090041A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13888973A JPS578735B2 (ja) | 1973-12-14 | 1973-12-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13888973A JPS578735B2 (ja) | 1973-12-14 | 1973-12-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5090041A true JPS5090041A (ja) | 1975-07-18 |
| JPS578735B2 JPS578735B2 (ja) | 1982-02-18 |
Family
ID=15232474
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13888973A Expired JPS578735B2 (ja) | 1973-12-14 | 1973-12-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS578735B2 (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60143872A (ja) * | 1983-12-28 | 1985-07-30 | Toshiba Corp | レジスト塗布装置 |
-
1973
- 1973-12-14 JP JP13888973A patent/JPS578735B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS578735B2 (ja) | 1982-02-18 |