JPS5089279A - - Google Patents
Info
- Publication number
- JPS5089279A JPS5089279A JP13904373A JP13904373A JPS5089279A JP S5089279 A JPS5089279 A JP S5089279A JP 13904373 A JP13904373 A JP 13904373A JP 13904373 A JP13904373 A JP 13904373A JP S5089279 A JPS5089279 A JP S5089279A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13904373A JPS5089279A (ja) | 1973-12-12 | 1973-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13904373A JPS5089279A (ja) | 1973-12-12 | 1973-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5089279A true JPS5089279A (ja) | 1975-07-17 |
Family
ID=15236110
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13904373A Pending JPS5089279A (ja) | 1973-12-12 | 1973-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5089279A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62167875A (ja) * | 1986-01-20 | 1987-07-24 | Nippon Soken Inc | 薄膜形成装置 |
-
1973
- 1973-12-12 JP JP13904373A patent/JPS5089279A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62167875A (ja) * | 1986-01-20 | 1987-07-24 | Nippon Soken Inc | 薄膜形成装置 |