JPS5089278A - - Google Patents
Info
- Publication number
- JPS5089278A JPS5089278A JP13904273A JP13904273A JPS5089278A JP S5089278 A JPS5089278 A JP S5089278A JP 13904273 A JP13904273 A JP 13904273A JP 13904273 A JP13904273 A JP 13904273A JP S5089278 A JPS5089278 A JP S5089278A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13904273A JPS5089278A (ja) | 1973-12-12 | 1973-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13904273A JPS5089278A (ja) | 1973-12-12 | 1973-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5089278A true JPS5089278A (ja) | 1975-07-17 |
Family
ID=15236086
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13904273A Pending JPS5089278A (ja) | 1973-12-12 | 1973-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5089278A (ja) |
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1973
- 1973-12-12 JP JP13904273A patent/JPS5089278A/ja active Pending