JPS508858U - - Google Patents
Info
- Publication number
- JPS508858U JPS508858U JP5965373U JP5965373U JPS508858U JP S508858 U JPS508858 U JP S508858U JP 5965373 U JP5965373 U JP 5965373U JP 5965373 U JP5965373 U JP 5965373U JP S508858 U JPS508858 U JP S508858U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5965373U JPS508858U (de) | 1973-05-21 | 1973-05-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5965373U JPS508858U (de) | 1973-05-21 | 1973-05-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS508858U true JPS508858U (de) | 1975-01-29 |
Family
ID=28218565
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5965373U Pending JPS508858U (de) | 1973-05-21 | 1973-05-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS508858U (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58217184A (ja) * | 1982-06-09 | 1983-12-17 | 三菱電機株式会社 | ウエハ乾燥装置 |
| JPS60173588U (ja) * | 1984-04-24 | 1985-11-16 | 鉄友工業株式会社 | 可搬式門型クレ−ン |
-
1973
- 1973-05-21 JP JP5965373U patent/JPS508858U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58217184A (ja) * | 1982-06-09 | 1983-12-17 | 三菱電機株式会社 | ウエハ乾燥装置 |
| JPS60173588U (ja) * | 1984-04-24 | 1985-11-16 | 鉄友工業株式会社 | 可搬式門型クレ−ン |