JPS5088547U - - Google Patents

Info

Publication number
JPS5088547U
JPS5088547U JP14660573U JP14660573U JPS5088547U JP S5088547 U JPS5088547 U JP S5088547U JP 14660573 U JP14660573 U JP 14660573U JP 14660573 U JP14660573 U JP 14660573U JP S5088547 U JPS5088547 U JP S5088547U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14660573U
Other versions
JPS5245646Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14660573U priority Critical patent/JPS5245646Y2/ja
Publication of JPS5088547U publication Critical patent/JPS5088547U/ja
Application granted granted Critical
Publication of JPS5245646Y2 publication Critical patent/JPS5245646Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP14660573U 1973-12-19 1973-12-19 Expired JPS5245646Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14660573U JPS5245646Y2 (ja) 1973-12-19 1973-12-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14660573U JPS5245646Y2 (ja) 1973-12-19 1973-12-19

Publications (2)

Publication Number Publication Date
JPS5088547U true JPS5088547U (ja) 1975-07-26
JPS5245646Y2 JPS5245646Y2 (ja) 1977-10-17

Family

ID=28435439

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14660573U Expired JPS5245646Y2 (ja) 1973-12-19 1973-12-19

Country Status (1)

Country Link
JP (1) JPS5245646Y2 (ja)

Also Published As

Publication number Publication date
JPS5245646Y2 (ja) 1977-10-17

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