JPS5087974A - - Google Patents

Info

Publication number
JPS5087974A
JPS5087974A JP48140083A JP14008373A JPS5087974A JP S5087974 A JPS5087974 A JP S5087974A JP 48140083 A JP48140083 A JP 48140083A JP 14008373 A JP14008373 A JP 14008373A JP S5087974 A JPS5087974 A JP S5087974A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48140083A
Other languages
Japanese (ja)
Other versions
JPS5144912B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48140083A priority Critical patent/JPS5144912B2/ja
Publication of JPS5087974A publication Critical patent/JPS5087974A/ja
Publication of JPS5144912B2 publication Critical patent/JPS5144912B2/ja
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J21/00—Catalysts comprising the elements, oxides, or hydroxides of magnesium, boron, aluminium, carbon, silicon, titanium, zirconium, or hafnium
    • B01J21/12—Silica and alumina

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Catalysts (AREA)
  • Inorganic Fibers (AREA)
JP48140083A 1973-12-09 1973-12-09 Expired JPS5144912B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48140083A JPS5144912B2 (enrdf_load_stackoverflow) 1973-12-09 1973-12-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48140083A JPS5144912B2 (enrdf_load_stackoverflow) 1973-12-09 1973-12-09

Publications (2)

Publication Number Publication Date
JPS5087974A true JPS5087974A (enrdf_load_stackoverflow) 1975-07-15
JPS5144912B2 JPS5144912B2 (enrdf_load_stackoverflow) 1976-12-01

Family

ID=15260553

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48140083A Expired JPS5144912B2 (enrdf_load_stackoverflow) 1973-12-09 1973-12-09

Country Status (1)

Country Link
JP (1) JPS5144912B2 (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07242078A (ja) * 1994-03-01 1995-09-19 Akinori Imamura 開頁保持具
US6086844A (en) * 1996-12-26 2000-07-11 Sumitomo Chemical Company, Ltd. Titania fiber, method for producing the fiber and method for using the fiber
WO2005010948A3 (en) * 2003-07-24 2005-09-15 Chemtrace Prec Cleaning Inc Cleaning process and apparatus for silicate materials
US7091132B2 (en) 2003-07-24 2006-08-15 Applied Materials, Inc. Ultrasonic assisted etch using corrosive liquids
US7754609B1 (en) 2003-10-28 2010-07-13 Applied Materials, Inc. Cleaning processes for silicon carbide materials
US7789969B2 (en) 2006-11-01 2010-09-07 Applied Materials, Inc. Methods and apparatus for cleaning chamber components

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5278641B2 (ja) * 2006-06-23 2013-09-04 日産自動車株式会社 メタル基材の製造方法

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07242078A (ja) * 1994-03-01 1995-09-19 Akinori Imamura 開頁保持具
US6086844A (en) * 1996-12-26 2000-07-11 Sumitomo Chemical Company, Ltd. Titania fiber, method for producing the fiber and method for using the fiber
US6191067B1 (en) 1996-12-26 2001-02-20 Sumitomo Chemical, Ltd. Titania fiber, method for producing the fiber and method for using the fiber
US6409961B1 (en) 1996-12-26 2002-06-25 Sumitomo Chemical Co., Ltd. Titania fiber, method for producing the fiber and method for using the fiber
US7091132B2 (en) 2003-07-24 2006-08-15 Applied Materials, Inc. Ultrasonic assisted etch using corrosive liquids
US7045072B2 (en) * 2003-07-24 2006-05-16 Tan Samantha S H Cleaning process and apparatus for silicate materials
WO2005010948A3 (en) * 2003-07-24 2005-09-15 Chemtrace Prec Cleaning Inc Cleaning process and apparatus for silicate materials
JP2006528841A (ja) * 2003-07-24 2006-12-21 ケムトレース プレシジョン クリーニング， インコーポレイテッド 珪酸塩材料に対するクリーニング方法及び装置
US7377991B2 (en) 2003-07-24 2008-05-27 Applied Materials, Inc. Ultrasonic assisted etch using corrosive liquids
JP4774367B2 (ja) * 2003-07-24 2011-09-14 アプライド マテリアルズ インコーポレイテッド 石英半導体製造基板の表面を処理する方法
KR101145470B1 (ko) 2003-07-24 2012-05-15 퀀텀 글로벌 테크놀로지스, 엘엘씨 실리케이트 재료용 세정 프로세스 및 장치
US7754609B1 (en) 2003-10-28 2010-07-13 Applied Materials, Inc. Cleaning processes for silicon carbide materials
US7789969B2 (en) 2006-11-01 2010-09-07 Applied Materials, Inc. Methods and apparatus for cleaning chamber components

Also Published As

Publication number Publication date
JPS5144912B2 (enrdf_load_stackoverflow) 1976-12-01

Similar Documents

Publication Publication Date Title
AR201758A1 (enrdf_load_stackoverflow)
AU476761B2 (enrdf_load_stackoverflow)
AU465372B2 (enrdf_load_stackoverflow)
AR201235Q (enrdf_load_stackoverflow)
AR201231Q (enrdf_load_stackoverflow)
AU474593B2 (enrdf_load_stackoverflow)
AU474511B2 (enrdf_load_stackoverflow)
AU474838B2 (enrdf_load_stackoverflow)
AU471343B2 (enrdf_load_stackoverflow)
AU465453B2 (enrdf_load_stackoverflow)
AU465434B2 (enrdf_load_stackoverflow)
AU450229B2 (enrdf_load_stackoverflow)
AU476714B2 (enrdf_load_stackoverflow)
JPS5087974A (enrdf_load_stackoverflow)
AR201229Q (enrdf_load_stackoverflow)
AU476696B2 (enrdf_load_stackoverflow)
AU472848B2 (enrdf_load_stackoverflow)
AU466283B2 (enrdf_load_stackoverflow)
AU477823B2 (enrdf_load_stackoverflow)
AU471461B2 (enrdf_load_stackoverflow)
AU447540B2 (enrdf_load_stackoverflow)
AR193950A1 (enrdf_load_stackoverflow)
AR200885A1 (enrdf_load_stackoverflow)
AU476873B1 (enrdf_load_stackoverflow)
AR201432A1 (enrdf_load_stackoverflow)