JPS5087974A - - Google Patents

Info

Publication number
JPS5087974A
JPS5087974A JP48140083A JP14008373A JPS5087974A JP S5087974 A JPS5087974 A JP S5087974A JP 48140083 A JP48140083 A JP 48140083A JP 14008373 A JP14008373 A JP 14008373A JP S5087974 A JPS5087974 A JP S5087974A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48140083A
Other languages
Japanese (ja)
Other versions
JPS5144912B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48140083A priority Critical patent/JPS5144912B2/ja
Publication of JPS5087974A publication Critical patent/JPS5087974A/ja
Publication of JPS5144912B2 publication Critical patent/JPS5144912B2/ja
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J21/00—Catalysts comprising the elements, oxides, or hydroxides of magnesium, boron, aluminium, carbon, silicon, titanium, zirconium, or hafnium
    • B01J21/12—Silica and alumina

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Catalysts (AREA)
  • Inorganic Fibers (AREA)
JP48140083A 1973-12-09 1973-12-09 Expired JPS5144912B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48140083A JPS5144912B2 (en) 1973-12-09 1973-12-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48140083A JPS5144912B2 (en) 1973-12-09 1973-12-09

Publications (2)

Publication Number Publication Date
JPS5087974A true JPS5087974A (en) 1975-07-15
JPS5144912B2 JPS5144912B2 (en) 1976-12-01

Family

ID=15260553

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48140083A Expired JPS5144912B2 (en) 1973-12-09 1973-12-09

Country Status (1)

Country Link
JP (1) JPS5144912B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07242078A (en) * 1994-03-01 1995-09-19 Akinori Imamura Page-opening retainer
US6086844A (en) * 1996-12-26 2000-07-11 Sumitomo Chemical Company, Ltd. Titania fiber, method for producing the fiber and method for using the fiber
WO2005010948A3 (en) * 2003-07-24 2005-09-15 Chemtrace Prec Cleaning Inc Cleaning process and apparatus for silicate materials
US7091132B2 (en) 2003-07-24 2006-08-15 Applied Materials, Inc. Ultrasonic assisted etch using corrosive liquids
US7754609B1 (en) 2003-10-28 2010-07-13 Applied Materials, Inc. Cleaning processes for silicon carbide materials
US7789969B2 (en) 2006-11-01 2010-09-07 Applied Materials, Inc. Methods and apparatus for cleaning chamber components

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5278641B2 (en) * 2006-06-23 2013-09-04 日産自動車株式会社 Metal substrate manufacturing method

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07242078A (en) * 1994-03-01 1995-09-19 Akinori Imamura Page-opening retainer
US6086844A (en) * 1996-12-26 2000-07-11 Sumitomo Chemical Company, Ltd. Titania fiber, method for producing the fiber and method for using the fiber
US6191067B1 (en) 1996-12-26 2001-02-20 Sumitomo Chemical, Ltd. Titania fiber, method for producing the fiber and method for using the fiber
US6409961B1 (en) 1996-12-26 2002-06-25 Sumitomo Chemical Co., Ltd. Titania fiber, method for producing the fiber and method for using the fiber
US7091132B2 (en) 2003-07-24 2006-08-15 Applied Materials, Inc. Ultrasonic assisted etch using corrosive liquids
US7045072B2 (en) * 2003-07-24 2006-05-16 Tan Samantha S H Cleaning process and apparatus for silicate materials
WO2005010948A3 (en) * 2003-07-24 2005-09-15 Chemtrace Prec Cleaning Inc Cleaning process and apparatus for silicate materials
JP2006528841A (en) * 2003-07-24 2006-12-21 ケムトレース プレシジョン クリーニング， インコーポレイテッド Cleaning method and apparatus for silicate materials
US7377991B2 (en) 2003-07-24 2008-05-27 Applied Materials, Inc. Ultrasonic assisted etch using corrosive liquids
JP4774367B2 (en) * 2003-07-24 2011-09-14 アプライド マテリアルズ インコーポレイテッド Method for treating the surface of a quartz semiconductor manufacturing substrate
KR101145470B1 (en) 2003-07-24 2012-05-15 퀀텀 글로벌 테크놀로지스, 엘엘씨 Cleaning process and apparatus for silicate materials
US7754609B1 (en) 2003-10-28 2010-07-13 Applied Materials, Inc. Cleaning processes for silicon carbide materials
US7789969B2 (en) 2006-11-01 2010-09-07 Applied Materials, Inc. Methods and apparatus for cleaning chamber components

Also Published As

Publication number Publication date
JPS5144912B2 (en) 1976-12-01

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