JPS5087282A - - Google Patents
Info
- Publication number
- JPS5087282A JPS5087282A JP13641873A JP13641873A JPS5087282A JP S5087282 A JPS5087282 A JP S5087282A JP 13641873 A JP13641873 A JP 13641873A JP 13641873 A JP13641873 A JP 13641873A JP S5087282 A JPS5087282 A JP S5087282A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Solid Materials (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13641873A JPS5338159B2 (ja) | 1973-12-03 | 1973-12-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13641873A JPS5338159B2 (ja) | 1973-12-03 | 1973-12-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5087282A true JPS5087282A (ja) | 1975-07-14 |
| JPS5338159B2 JPS5338159B2 (ja) | 1978-10-13 |
Family
ID=15174681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13641873A Expired JPS5338159B2 (ja) | 1973-12-03 | 1973-12-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5338159B2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58135644A (ja) * | 1982-01-14 | 1983-08-12 | Seiko Epson Corp | ウエツト処理装置 |
-
1973
- 1973-12-03 JP JP13641873A patent/JPS5338159B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58135644A (ja) * | 1982-01-14 | 1983-08-12 | Seiko Epson Corp | ウエツト処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5338159B2 (ja) | 1978-10-13 |