JPS5087149U - - Google Patents

Info

Publication number
JPS5087149U
JPS5087149U JP14498773U JP14498773U JPS5087149U JP S5087149 U JPS5087149 U JP S5087149U JP 14498773 U JP14498773 U JP 14498773U JP 14498773 U JP14498773 U JP 14498773U JP S5087149 U JPS5087149 U JP S5087149U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14498773U
Other versions
JPS5255484Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14498773U priority Critical patent/JPS5255484Y2/ja
Publication of JPS5087149U publication Critical patent/JPS5087149U/ja
Application granted granted Critical
Publication of JPS5255484Y2 publication Critical patent/JPS5255484Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP14498773U 1973-12-17 1973-12-17 Expired JPS5255484Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14498773U JPS5255484Y2 (ja) 1973-12-17 1973-12-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14498773U JPS5255484Y2 (ja) 1973-12-17 1973-12-17

Publications (2)

Publication Number Publication Date
JPS5087149U true JPS5087149U (ja) 1975-07-24
JPS5255484Y2 JPS5255484Y2 (ja) 1977-12-15

Family

ID=28430885

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14498773U Expired JPS5255484Y2 (ja) 1973-12-17 1973-12-17

Country Status (1)

Country Link
JP (1) JPS5255484Y2 (ja)

Also Published As

Publication number Publication date
JPS5255484Y2 (ja) 1977-12-15

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