JPS508681U - - Google Patents

Info

Publication number
JPS508681U
JPS508681U JP6005473U JP6005473U JPS508681U JP S508681 U JPS508681 U JP S508681U JP 6005473 U JP6005473 U JP 6005473U JP 6005473 U JP6005473 U JP 6005473U JP S508681 U JPS508681 U JP S508681U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6005473U
Other languages
Japanese (ja)
Other versions
JPS5313182Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6005473U priority Critical patent/JPS5313182Y2/ja
Publication of JPS508681U publication Critical patent/JPS508681U/ja
Application granted granted Critical
Publication of JPS5313182Y2 publication Critical patent/JPS5313182Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Belt Conveyors (AREA)
  • Chain Conveyers (AREA)
JP6005473U 1973-05-22 1973-05-22 Expired JPS5313182Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6005473U JPS5313182Y2 (enrdf_load_stackoverflow) 1973-05-22 1973-05-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6005473U JPS5313182Y2 (enrdf_load_stackoverflow) 1973-05-22 1973-05-22

Publications (2)

Publication Number Publication Date
JPS508681U true JPS508681U (enrdf_load_stackoverflow) 1975-01-29
JPS5313182Y2 JPS5313182Y2 (enrdf_load_stackoverflow) 1978-04-10

Family

ID=28219333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6005473U Expired JPS5313182Y2 (enrdf_load_stackoverflow) 1973-05-22 1973-05-22

Country Status (1)

Country Link
JP (1) JPS5313182Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01107368U (enrdf_load_stackoverflow) * 1988-01-12 1989-07-19
JP2004274033A (ja) * 2003-01-27 2004-09-30 Applied Materials Inc 基板キャリヤの輸送方法および装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01107368U (enrdf_load_stackoverflow) * 1988-01-12 1989-07-19
JP2004274033A (ja) * 2003-01-27 2004-09-30 Applied Materials Inc 基板キャリヤの輸送方法および装置

Also Published As

Publication number Publication date
JPS5313182Y2 (enrdf_load_stackoverflow) 1978-04-10

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