JPS5086279A - - Google Patents
Info
- Publication number
- JPS5086279A JPS5086279A JP13342573A JP13342573A JPS5086279A JP S5086279 A JPS5086279 A JP S5086279A JP 13342573 A JP13342573 A JP 13342573A JP 13342573 A JP13342573 A JP 13342573A JP S5086279 A JPS5086279 A JP S5086279A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13342573A JPS5086279A (cs) | 1973-11-30 | 1973-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13342573A JPS5086279A (cs) | 1973-11-30 | 1973-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5086279A true JPS5086279A (cs) | 1975-07-11 |
Family
ID=15104460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13342573A Pending JPS5086279A (cs) | 1973-11-30 | 1973-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5086279A (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57176720A (en) * | 1981-04-22 | 1982-10-30 | Nec Corp | Semiconductor device |
| JPS6450316U (cs) * | 1987-09-24 | 1989-03-28 |
-
1973
- 1973-11-30 JP JP13342573A patent/JPS5086279A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57176720A (en) * | 1981-04-22 | 1982-10-30 | Nec Corp | Semiconductor device |
| JPS6450316U (cs) * | 1987-09-24 | 1989-03-28 |