JPS5085276A - - Google Patents
Info
- Publication number
- JPS5085276A JPS5085276A JP13475873A JP13475873A JPS5085276A JP S5085276 A JPS5085276 A JP S5085276A JP 13475873 A JP13475873 A JP 13475873A JP 13475873 A JP13475873 A JP 13475873A JP S5085276 A JPS5085276 A JP S5085276A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13475873A JPS5085276A (de) | 1973-11-28 | 1973-11-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13475873A JPS5085276A (de) | 1973-11-28 | 1973-11-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5085276A true JPS5085276A (de) | 1975-07-09 |
Family
ID=15135860
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13475873A Pending JPS5085276A (de) | 1973-11-28 | 1973-11-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5085276A (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53139467A (en) * | 1977-05-12 | 1978-12-05 | Mitsubishi Metal Corp | Method of diffusing impurity in semiconductor substrate |
-
1973
- 1973-11-28 JP JP13475873A patent/JPS5085276A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53139467A (en) * | 1977-05-12 | 1978-12-05 | Mitsubishi Metal Corp | Method of diffusing impurity in semiconductor substrate |
JPS6011803B2 (ja) * | 1977-05-12 | 1985-03-28 | 日本シリコン株式会社 | 半導体素子基板表面に不純物拡散層を形成する方法 |