JPS5085275A - - Google Patents
Info
- Publication number
- JPS5085275A JPS5085275A JP13274973A JP13274973A JPS5085275A JP S5085275 A JPS5085275 A JP S5085275A JP 13274973 A JP13274973 A JP 13274973A JP 13274973 A JP13274973 A JP 13274973A JP S5085275 A JPS5085275 A JP S5085275A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13274973A JPS5085275A (ja) | 1973-11-28 | 1973-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13274973A JPS5085275A (ja) | 1973-11-28 | 1973-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5085275A true JPS5085275A (ja) | 1975-07-09 |
Family
ID=15088668
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13274973A Pending JPS5085275A (ja) | 1973-11-28 | 1973-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5085275A (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6233437A (ja) * | 1985-08-07 | 1987-02-13 | Mitsubishi Electric Corp | 半導体ウエハの整列装置 |
| JPH0198224A (ja) * | 1987-10-12 | 1989-04-17 | Mitsubishi Metal Corp | シリコンウェーハの不純物拡散方法 |
-
1973
- 1973-11-28 JP JP13274973A patent/JPS5085275A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6233437A (ja) * | 1985-08-07 | 1987-02-13 | Mitsubishi Electric Corp | 半導体ウエハの整列装置 |
| JPH0198224A (ja) * | 1987-10-12 | 1989-04-17 | Mitsubishi Metal Corp | シリコンウェーハの不純物拡散方法 |