JPS5084310A - - Google Patents

Info

Publication number
JPS5084310A
JPS5084310A JP48136532A JP13653273A JPS5084310A JP S5084310 A JPS5084310 A JP S5084310A JP 48136532 A JP48136532 A JP 48136532A JP 13653273 A JP13653273 A JP 13653273A JP S5084310 A JPS5084310 A JP S5084310A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48136532A
Other languages
Japanese (ja)
Other versions
JPS5416242B2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13653273A priority Critical patent/JPS5416242B2/ja
Publication of JPS5084310A publication Critical patent/JPS5084310A/ja
Publication of JPS5416242B2 publication Critical patent/JPS5416242B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP13653273A 1973-11-24 1973-11-24 Expired JPS5416242B2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13653273A JPS5416242B2 (cg-RX-API-DMAC7.html) 1973-11-24 1973-11-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13653273A JPS5416242B2 (cg-RX-API-DMAC7.html) 1973-11-24 1973-11-24

Publications (2)

Publication Number Publication Date
JPS5084310A true JPS5084310A (cg-RX-API-DMAC7.html) 1975-07-08
JPS5416242B2 JPS5416242B2 (cg-RX-API-DMAC7.html) 1979-06-21

Family

ID=15177376

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13653273A Expired JPS5416242B2 (cg-RX-API-DMAC7.html) 1973-11-24 1973-11-24

Country Status (1)

Country Link
JP (1) JPS5416242B2 (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5443403U (cg-RX-API-DMAC7.html) * 1977-08-31 1979-03-24

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4931401A (cg-RX-API-DMAC7.html) * 1972-07-20 1974-03-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4931401A (cg-RX-API-DMAC7.html) * 1972-07-20 1974-03-20

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5443403U (cg-RX-API-DMAC7.html) * 1977-08-31 1979-03-24

Also Published As

Publication number Publication date
JPS5416242B2 (cg-RX-API-DMAC7.html) 1979-06-21

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