JPS5084175A - - Google Patents
Info
- Publication number
- JPS5084175A JPS5084175A JP13173273A JP13173273A JPS5084175A JP S5084175 A JPS5084175 A JP S5084175A JP 13173273 A JP13173273 A JP 13173273A JP 13173273 A JP13173273 A JP 13173273A JP S5084175 A JPS5084175 A JP S5084175A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13173273A JPS5242667B2 (ja) | 1973-11-26 | 1973-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13173273A JPS5242667B2 (ja) | 1973-11-26 | 1973-11-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5084175A true JPS5084175A (ja) | 1975-07-07 |
| JPS5242667B2 JPS5242667B2 (ja) | 1977-10-26 |
Family
ID=15064888
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13173273A Expired JPS5242667B2 (ja) | 1973-11-26 | 1973-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5242667B2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5443839A (en) * | 1977-09-13 | 1979-04-06 | Ibm | Method of forming silicon oxide territory |
-
1973
- 1973-11-26 JP JP13173273A patent/JPS5242667B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5443839A (en) * | 1977-09-13 | 1979-04-06 | Ibm | Method of forming silicon oxide territory |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5242667B2 (ja) | 1977-10-26 |