JPS5084010U - - Google Patents
Info
- Publication number
- JPS5084010U JPS5084010U JP1974086184U JP8618474U JPS5084010U JP S5084010 U JPS5084010 U JP S5084010U JP 1974086184 U JP1974086184 U JP 1974086184U JP 8618474 U JP8618474 U JP 8618474U JP S5084010 U JPS5084010 U JP S5084010U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19732338939 DE2338939C3 (de) | 1973-08-01 | Reinigungseinrichtung für leere Bandspulen, insbesondere für Magnetbandspulen |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5084010U true JPS5084010U (ja) | 1975-07-18 |
| JPS5533513Y2 JPS5533513Y2 (ja) | 1980-08-08 |
Family
ID=5888555
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1974086184U Expired JPS5533513Y2 (ja) | 1973-08-01 | 1974-07-22 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3939526A (ja) |
| JP (1) | JPS5533513Y2 (ja) |
| FR (1) | FR2239731B3 (ja) |
| GB (1) | GB1473154A (ja) |
| IT (1) | IT1018759B (ja) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4701973A (en) * | 1984-08-27 | 1987-10-27 | William J. McBrady | Bottle duster |
| US4677704A (en) * | 1986-04-22 | 1987-07-07 | Huggins Richard A | Cleaning system for static charged semiconductor wafer surface |
| US4727614A (en) * | 1987-01-20 | 1988-03-01 | Shape Inc. | Ground corona comb |
| US5173988A (en) * | 1991-06-17 | 1992-12-29 | Videojet Systems International, Inc. | Dewatering apparatus for drop marking bottles and cans |
| US5350428A (en) * | 1993-06-17 | 1994-09-27 | Vlsi Technology, Inc. | Electrostatic apparatus and method for removing particles from semiconductor wafers |
| JP3452676B2 (ja) * | 1995-02-15 | 2003-09-29 | 宮崎沖電気株式会社 | 半導体ウエハ面のパーティクルの除去装置及びそれを用いた半導体ウエハ面のパーティクルの除去方法 |
| US5839455A (en) * | 1995-04-13 | 1998-11-24 | Texas Instruments Incorporated | Enhanced high pressure cleansing system for wafer handling implements |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2413937A (en) * | 1941-08-19 | 1947-01-07 | Metalwash Machinery Co | Sectional nozzle structure for driers |
| US3668008A (en) * | 1969-06-04 | 1972-06-06 | Xerox Corp | Ionized air cleaning device |
-
1974
- 1974-07-22 JP JP1974086184U patent/JPS5533513Y2/ja not_active Expired
- 1974-07-30 US US05/493,055 patent/US3939526A/en not_active Expired - Lifetime
- 1974-07-30 GB GB3352274A patent/GB1473154A/en not_active Expired
- 1974-07-30 IT IT52342/74A patent/IT1018759B/it active
- 1974-07-30 FR FR7426394A patent/FR2239731B3/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR2239731B3 (ja) | 1978-05-19 |
| IT1018759B (it) | 1977-10-20 |
| GB1473154A (ja) | 1977-05-11 |
| FR2239731A1 (ja) | 1975-02-28 |
| DE2338939B2 (de) | 1977-05-18 |
| JPS5533513Y2 (ja) | 1980-08-08 |
| DE2338939A1 (de) | 1975-02-27 |
| US3939526A (en) | 1976-02-24 |