JPS5081685A - - Google Patents

Info

Publication number
JPS5081685A
JPS5081685A JP13092773A JP13092773A JPS5081685A JP S5081685 A JPS5081685 A JP S5081685A JP 13092773 A JP13092773 A JP 13092773A JP 13092773 A JP13092773 A JP 13092773A JP S5081685 A JPS5081685 A JP S5081685A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13092773A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13092773A priority Critical patent/JPS5081685A/ja
Publication of JPS5081685A publication Critical patent/JPS5081685A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP13092773A 1973-11-21 1973-11-21 Pending JPS5081685A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13092773A JPS5081685A (enrdf_load_stackoverflow) 1973-11-21 1973-11-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13092773A JPS5081685A (enrdf_load_stackoverflow) 1973-11-21 1973-11-21

Publications (1)

Publication Number Publication Date
JPS5081685A true JPS5081685A (enrdf_load_stackoverflow) 1975-07-02

Family

ID=15045970

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13092773A Pending JPS5081685A (enrdf_load_stackoverflow) 1973-11-21 1973-11-21

Country Status (1)

Country Link
JP (1) JPS5081685A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56100416A (en) * 1980-01-16 1981-08-12 Fujitsu Ltd Method and device for correcting mask

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56100416A (en) * 1980-01-16 1981-08-12 Fujitsu Ltd Method and device for correcting mask

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