JPS5081685A - - Google Patents
Info
- Publication number
- JPS5081685A JPS5081685A JP13092773A JP13092773A JPS5081685A JP S5081685 A JPS5081685 A JP S5081685A JP 13092773 A JP13092773 A JP 13092773A JP 13092773 A JP13092773 A JP 13092773A JP S5081685 A JPS5081685 A JP S5081685A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13092773A JPS5081685A (OSRAM) | 1973-11-21 | 1973-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13092773A JPS5081685A (OSRAM) | 1973-11-21 | 1973-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5081685A true JPS5081685A (OSRAM) | 1975-07-02 |
Family
ID=15045970
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13092773A Pending JPS5081685A (OSRAM) | 1973-11-21 | 1973-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5081685A (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56100416A (en) * | 1980-01-16 | 1981-08-12 | Fujitsu Ltd | Method and device for correcting mask |
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1973
- 1973-11-21 JP JP13092773A patent/JPS5081685A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56100416A (en) * | 1980-01-16 | 1981-08-12 | Fujitsu Ltd | Method and device for correcting mask |