JPS5081063A - - Google Patents

Info

Publication number
JPS5081063A
JPS5081063A JP12846573A JP12846573A JPS5081063A JP S5081063 A JPS5081063 A JP S5081063A JP 12846573 A JP12846573 A JP 12846573A JP 12846573 A JP12846573 A JP 12846573A JP S5081063 A JPS5081063 A JP S5081063A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12846573A
Other languages
Japanese (ja)
Other versions
JPS5733704B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12846573A priority Critical patent/JPS5733704B2/ja
Publication of JPS5081063A publication Critical patent/JPS5081063A/ja
Publication of JPS5733704B2 publication Critical patent/JPS5733704B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP12846573A 1973-11-15 1973-11-15 Expired JPS5733704B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12846573A JPS5733704B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-11-15 1973-11-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12846573A JPS5733704B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-11-15 1973-11-15

Publications (2)

Publication Number Publication Date
JPS5081063A true JPS5081063A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-07-01
JPS5733704B2 JPS5733704B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-07-19

Family

ID=14985379

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12846573A Expired JPS5733704B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-11-15 1973-11-15

Country Status (1)

Country Link
JP (1) JPS5733704B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5664453A (en) * 1979-10-31 1981-06-01 Chiyou Lsi Gijutsu Kenkyu Kumiai Manufacture of semiconductor device
JPS58165364A (ja) * 1982-03-26 1983-09-30 Agency Of Ind Science & Technol 三次元回路素子の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4852185A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-10-29 1973-07-21

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4852185A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-10-29 1973-07-21

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5664453A (en) * 1979-10-31 1981-06-01 Chiyou Lsi Gijutsu Kenkyu Kumiai Manufacture of semiconductor device
JPS58165364A (ja) * 1982-03-26 1983-09-30 Agency Of Ind Science & Technol 三次元回路素子の製造方法

Also Published As

Publication number Publication date
JPS5733704B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-07-19

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