JPS5080981A - - Google Patents
Info
- Publication number
- JPS5080981A JPS5080981A JP13088673A JP13088673A JPS5080981A JP S5080981 A JPS5080981 A JP S5080981A JP 13088673 A JP13088673 A JP 13088673A JP 13088673 A JP13088673 A JP 13088673A JP S5080981 A JPS5080981 A JP S5080981A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13088673A JPS56507B2 (ja) | 1973-11-21 | 1973-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13088673A JPS56507B2 (ja) | 1973-11-21 | 1973-11-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5080981A true JPS5080981A (ja) | 1975-07-01 |
| JPS56507B2 JPS56507B2 (ja) | 1981-01-08 |
Family
ID=15044985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13088673A Expired JPS56507B2 (ja) | 1973-11-21 | 1973-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56507B2 (ja) |
-
1973
- 1973-11-21 JP JP13088673A patent/JPS56507B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56507B2 (ja) | 1981-01-08 |