JPS5080974U - - Google Patents
Info
- Publication number
- JPS5080974U JPS5080974U JP13755573U JP13755573U JPS5080974U JP S5080974 U JPS5080974 U JP S5080974U JP 13755573 U JP13755573 U JP 13755573U JP 13755573 U JP13755573 U JP 13755573U JP S5080974 U JPS5080974 U JP S5080974U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1973137555U JPS549337Y2 (ja) | 1973-11-30 | 1973-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1973137555U JPS549337Y2 (ja) | 1973-11-30 | 1973-11-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5080974U true JPS5080974U (ja) | 1975-07-12 |
| JPS549337Y2 JPS549337Y2 (ja) | 1979-05-01 |
Family
ID=28409985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1973137555U Expired JPS549337Y2 (ja) | 1973-11-30 | 1973-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS549337Y2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01192130A (ja) * | 1988-01-27 | 1989-08-02 | Tokyo Electron Ltd | 検査装置 |
-
1973
- 1973-11-30 JP JP1973137555U patent/JPS549337Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01192130A (ja) * | 1988-01-27 | 1989-08-02 | Tokyo Electron Ltd | 検査装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS549337Y2 (ja) | 1979-05-01 |