JPS5080834A - - Google Patents

Info

Publication number
JPS5080834A
JPS5080834A JP48128415A JP12841573A JPS5080834A JP S5080834 A JPS5080834 A JP S5080834A JP 48128415 A JP48128415 A JP 48128415A JP 12841573 A JP12841573 A JP 12841573A JP S5080834 A JPS5080834 A JP S5080834A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48128415A
Other versions
JPS5637542B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12841573A priority Critical patent/JPS5637542B2/ja
Publication of JPS5080834A publication Critical patent/JPS5080834A/ja
Publication of JPS5637542B2 publication Critical patent/JPS5637542B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
JP12841573A 1973-11-16 1973-11-16 Expired JPS5637542B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12841573A JPS5637542B2 (ja) 1973-11-16 1973-11-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12841573A JPS5637542B2 (ja) 1973-11-16 1973-11-16

Publications (2)

Publication Number Publication Date
JPS5080834A true JPS5080834A (ja) 1975-07-01
JPS5637542B2 JPS5637542B2 (ja) 1981-09-01

Family

ID=14984188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12841573A Expired JPS5637542B2 (ja) 1973-11-16 1973-11-16

Country Status (1)

Country Link
JP (1) JPS5637542B2 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5242260A (en) * 1975-10-01 1977-04-01 Hitachi Ltd Preparation of printed circuit
JPS53116090A (en) * 1977-03-22 1978-10-11 Oki Electric Ind Co Ltd Through-hole forming method for semiconductor integrated circuit
JPS564236A (en) * 1979-06-25 1981-01-17 Nec Corp Manufacture of photoresist film pattern
JPS56129323A (en) * 1980-03-17 1981-10-09 Toshiba Corp Manufacture of semiconductor device
JPS5732635A (en) * 1980-08-07 1982-02-22 Nec Corp Production of semiconductor device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5242260A (en) * 1975-10-01 1977-04-01 Hitachi Ltd Preparation of printed circuit
JPS53116090A (en) * 1977-03-22 1978-10-11 Oki Electric Ind Co Ltd Through-hole forming method for semiconductor integrated circuit
JPS564236A (en) * 1979-06-25 1981-01-17 Nec Corp Manufacture of photoresist film pattern
JPS56129323A (en) * 1980-03-17 1981-10-09 Toshiba Corp Manufacture of semiconductor device
JPS5732635A (en) * 1980-08-07 1982-02-22 Nec Corp Production of semiconductor device

Also Published As

Publication number Publication date
JPS5637542B2 (ja) 1981-09-01

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