JPS5080755A - - Google Patents
Info
- Publication number
- JPS5080755A JPS5080755A JP12730573A JP12730573A JPS5080755A JP S5080755 A JPS5080755 A JP S5080755A JP 12730573 A JP12730573 A JP 12730573A JP 12730573 A JP12730573 A JP 12730573A JP S5080755 A JPS5080755 A JP S5080755A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12730573A JPS5080755A (ja) | 1973-11-14 | 1973-11-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12730573A JPS5080755A (ja) | 1973-11-14 | 1973-11-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5080755A true JPS5080755A (ja) | 1975-07-01 |
Family
ID=14956650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12730573A Pending JPS5080755A (ja) | 1973-11-14 | 1973-11-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5080755A (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59229823A (ja) * | 1984-02-24 | 1984-12-24 | Hitachi Ltd | エツチング方法 |
| JPS62115736A (ja) * | 1985-11-14 | 1987-05-27 | Mitsubishi Electric Corp | 成膜装置 |
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1973
- 1973-11-14 JP JP12730573A patent/JPS5080755A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59229823A (ja) * | 1984-02-24 | 1984-12-24 | Hitachi Ltd | エツチング方法 |
| JPS62115736A (ja) * | 1985-11-14 | 1987-05-27 | Mitsubishi Electric Corp | 成膜装置 |