JPS5080355U - - Google Patents
Info
- Publication number
- JPS5080355U JPS5080355U JP13656173U JP13656173U JPS5080355U JP S5080355 U JPS5080355 U JP S5080355U JP 13656173 U JP13656173 U JP 13656173U JP 13656173 U JP13656173 U JP 13656173U JP S5080355 U JPS5080355 U JP S5080355U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13656173U JPS5080355U (ja) | 1973-11-27 | 1973-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13656173U JPS5080355U (ja) | 1973-11-27 | 1973-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5080355U true JPS5080355U (ja) | 1975-07-11 |
Family
ID=28407176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13656173U Pending JPS5080355U (ja) | 1973-11-27 | 1973-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5080355U (ja) |
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1973
- 1973-11-27 JP JP13656173U patent/JPS5080355U/ja active Pending