JPS5079499A - - Google Patents

Info

Publication number
JPS5079499A
JPS5079499A JP48128787A JP12878773A JPS5079499A JP S5079499 A JPS5079499 A JP S5079499A JP 48128787 A JP48128787 A JP 48128787A JP 12878773 A JP12878773 A JP 12878773A JP S5079499 A JPS5079499 A JP S5079499A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48128787A
Other languages
Japanese (ja)
Other versions
JPS5248956B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48128787A priority Critical patent/JPS5248956B2/ja
Publication of JPS5079499A publication Critical patent/JPS5079499A/ja
Publication of JPS5248956B2 publication Critical patent/JPS5248956B2/ja
Expired legal-status Critical Current

Links

JP48128787A 1973-11-17 1973-11-17 Expired JPS5248956B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48128787A JPS5248956B2 (en) 1973-11-17 1973-11-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48128787A JPS5248956B2 (en) 1973-11-17 1973-11-17

Publications (2)

Publication Number Publication Date
JPS5079499A true JPS5079499A (en) 1975-06-27
JPS5248956B2 JPS5248956B2 (en) 1977-12-13

Family

ID=14993431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48128787A Expired JPS5248956B2 (en) 1973-11-17 1973-11-17

Country Status (1)

Country Link
JP (1) JPS5248956B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007196204A (en) * 2006-01-26 2007-08-09 Kocat Inc Apparatus and method for treating exhaust gas generated from semiconductor manufacturing process
DE102007045337A1 (en) * 2007-09-22 2009-04-02 Bayerische Motoren Werke Aktiengesellschaft Method for protecting chromate contained dust, involves extracting air at position, at which heat processing takes place and air is loaded with chromate contained dust
AT511939A4 (en) * 2012-02-03 2013-04-15 Vaillant Group Austria Gmbh FILTER
EP2620199A1 (en) * 2012-01-27 2013-07-31 Vaillant GmbH Hot Air Filter

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03207Y2 (en) * 1988-03-25 1991-01-08

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007196204A (en) * 2006-01-26 2007-08-09 Kocat Inc Apparatus and method for treating exhaust gas generated from semiconductor manufacturing process
DE102007045337A1 (en) * 2007-09-22 2009-04-02 Bayerische Motoren Werke Aktiengesellschaft Method for protecting chromate contained dust, involves extracting air at position, at which heat processing takes place and air is loaded with chromate contained dust
EP2620199A1 (en) * 2012-01-27 2013-07-31 Vaillant GmbH Hot Air Filter
AT511939A4 (en) * 2012-02-03 2013-04-15 Vaillant Group Austria Gmbh FILTER
AT511939B1 (en) * 2012-02-03 2013-04-15 Vaillant Group Austria Gmbh FILTER

Also Published As

Publication number Publication date
JPS5248956B2 (en) 1977-12-13

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