JPS5079258A - - Google Patents

Info

Publication number
JPS5079258A
JPS5079258A JP12641473A JP12641473A JPS5079258A JP S5079258 A JPS5079258 A JP S5079258A JP 12641473 A JP12641473 A JP 12641473A JP 12641473 A JP12641473 A JP 12641473A JP S5079258 A JPS5079258 A JP S5079258A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12641473A
Other languages
Japanese (ja)
Other versions
JPS5623958B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12641473A priority Critical patent/JPS5623958B2/ja
Publication of JPS5079258A publication Critical patent/JPS5079258A/ja
Publication of JPS5623958B2 publication Critical patent/JPS5623958B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP12641473A 1973-11-10 1973-11-10 Expired JPS5623958B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12641473A JPS5623958B2 (enrdf_load_stackoverflow) 1973-11-10 1973-11-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12641473A JPS5623958B2 (enrdf_load_stackoverflow) 1973-11-10 1973-11-10

Publications (2)

Publication Number Publication Date
JPS5079258A true JPS5079258A (enrdf_load_stackoverflow) 1975-06-27
JPS5623958B2 JPS5623958B2 (enrdf_load_stackoverflow) 1981-06-03

Family

ID=14934562

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12641473A Expired JPS5623958B2 (enrdf_load_stackoverflow) 1973-11-10 1973-11-10

Country Status (1)

Country Link
JP (1) JPS5623958B2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5110764A (en) * 1974-07-16 1976-01-28 Nippon Telegraph & Telephone Kagobutsuhandotaino seizohoho
JPS5775421A (en) * 1980-10-28 1982-05-12 Mitsubishi Monsanto Chem Co Method of vapor growth compound semiconductor epitaxial film
JPS58108734A (ja) * 1981-12-23 1983-06-28 Fujitsu Ltd 気相成長法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5110764A (en) * 1974-07-16 1976-01-28 Nippon Telegraph & Telephone Kagobutsuhandotaino seizohoho
JPS5775421A (en) * 1980-10-28 1982-05-12 Mitsubishi Monsanto Chem Co Method of vapor growth compound semiconductor epitaxial film
JPS58108734A (ja) * 1981-12-23 1983-06-28 Fujitsu Ltd 気相成長法

Also Published As

Publication number Publication date
JPS5623958B2 (enrdf_load_stackoverflow) 1981-06-03

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