JPS5079085A - - Google Patents
Info
- Publication number
- JPS5079085A JPS5079085A JP12827773A JP12827773A JPS5079085A JP S5079085 A JPS5079085 A JP S5079085A JP 12827773 A JP12827773 A JP 12827773A JP 12827773 A JP12827773 A JP 12827773A JP S5079085 A JPS5079085 A JP S5079085A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Delivering By Means Of Belts And Rollers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12827773A JPS5079085A (ja) | 1973-11-16 | 1973-11-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12827773A JPS5079085A (ja) | 1973-11-16 | 1973-11-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5079085A true JPS5079085A (ja) | 1975-06-27 |
Family
ID=14980835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12827773A Pending JPS5079085A (ja) | 1973-11-16 | 1973-11-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5079085A (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS612614A (ja) * | 1985-06-07 | 1986-01-08 | Hitachi Ltd | 空気浮上式ウエハ搬送路 |
| JP2001063822A (ja) * | 1999-08-30 | 2001-03-13 | Watanabe Shoko:Kk | 浮上搬送方法 |
-
1973
- 1973-11-16 JP JP12827773A patent/JPS5079085A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS612614A (ja) * | 1985-06-07 | 1986-01-08 | Hitachi Ltd | 空気浮上式ウエハ搬送路 |
| JP2001063822A (ja) * | 1999-08-30 | 2001-03-13 | Watanabe Shoko:Kk | 浮上搬送方法 |