JPS5078717U - - Google Patents

Info

Publication number
JPS5078717U
JPS5078717U JP13566673U JP13566673U JPS5078717U JP S5078717 U JPS5078717 U JP S5078717U JP 13566673 U JP13566673 U JP 13566673U JP 13566673 U JP13566673 U JP 13566673U JP S5078717 U JPS5078717 U JP S5078717U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13566673U
Other versions
JPS538059Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13566673U priority Critical patent/JPS538059Y2/ja
Publication of JPS5078717U publication Critical patent/JPS5078717U/ja
Application granted granted Critical
Publication of JPS538059Y2 publication Critical patent/JPS538059Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP13566673U 1973-11-27 1973-11-27 Expired JPS538059Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13566673U JPS538059Y2 (ja) 1973-11-27 1973-11-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13566673U JPS538059Y2 (ja) 1973-11-27 1973-11-27

Publications (2)

Publication Number Publication Date
JPS5078717U true JPS5078717U (ja) 1975-07-08
JPS538059Y2 JPS538059Y2 (ja) 1978-03-01

Family

ID=28404679

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13566673U Expired JPS538059Y2 (ja) 1973-11-27 1973-11-27

Country Status (1)

Country Link
JP (1) JPS538059Y2 (ja)

Also Published As

Publication number Publication date
JPS538059Y2 (ja) 1978-03-01

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