JPS5078405A - - Google Patents
Info
- Publication number
- JPS5078405A JPS5078405A JP12917473A JP12917473A JPS5078405A JP S5078405 A JPS5078405 A JP S5078405A JP 12917473 A JP12917473 A JP 12917473A JP 12917473 A JP12917473 A JP 12917473A JP S5078405 A JPS5078405 A JP S5078405A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12917473A JPS5135884B2 (ja) | 1973-11-19 | 1973-11-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12917473A JPS5135884B2 (ja) | 1973-11-19 | 1973-11-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5078405A true JPS5078405A (ja) | 1975-06-26 |
| JPS5135884B2 JPS5135884B2 (ja) | 1976-10-05 |
Family
ID=15002965
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12917473A Expired JPS5135884B2 (ja) | 1973-11-19 | 1973-11-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5135884B2 (ja) |
-
1973
- 1973-11-19 JP JP12917473A patent/JPS5135884B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5135884B2 (ja) | 1976-10-05 |