JPS5078404A - - Google Patents
Info
- Publication number
- JPS5078404A JPS5078404A JP12917373A JP12917373A JPS5078404A JP S5078404 A JPS5078404 A JP S5078404A JP 12917373 A JP12917373 A JP 12917373A JP 12917373 A JP12917373 A JP 12917373A JP S5078404 A JPS5078404 A JP S5078404A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12917373A JPS5146444B2 (ja) | 1973-11-19 | 1973-11-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12917373A JPS5146444B2 (ja) | 1973-11-19 | 1973-11-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5078404A true JPS5078404A (ja) | 1975-06-26 |
| JPS5146444B2 JPS5146444B2 (ja) | 1976-12-09 |
Family
ID=15002938
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12917373A Expired JPS5146444B2 (ja) | 1973-11-19 | 1973-11-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5146444B2 (ja) |
-
1973
- 1973-11-19 JP JP12917373A patent/JPS5146444B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5146444B2 (ja) | 1976-12-09 |