JPS5078164U - - Google Patents

Info

Publication number
JPS5078164U
JPS5078164U JP13447273U JP13447273U JPS5078164U JP S5078164 U JPS5078164 U JP S5078164U JP 13447273 U JP13447273 U JP 13447273U JP 13447273 U JP13447273 U JP 13447273U JP S5078164 U JPS5078164 U JP S5078164U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13447273U
Other versions
JPS5249971Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13447273U priority Critical patent/JPS5249971Y2/ja
Publication of JPS5078164U publication Critical patent/JPS5078164U/ja
Application granted granted Critical
Publication of JPS5249971Y2 publication Critical patent/JPS5249971Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP13447273U 1973-11-20 1973-11-20 Expired JPS5249971Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13447273U JPS5249971Y2 (ja) 1973-11-20 1973-11-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13447273U JPS5249971Y2 (ja) 1973-11-20 1973-11-20

Publications (2)

Publication Number Publication Date
JPS5078164U true JPS5078164U (ja) 1975-07-07
JPS5249971Y2 JPS5249971Y2 (ja) 1977-11-12

Family

ID=28401354

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13447273U Expired JPS5249971Y2 (ja) 1973-11-20 1973-11-20

Country Status (1)

Country Link
JP (1) JPS5249971Y2 (ja)

Also Published As

Publication number Publication date
JPS5249971Y2 (ja) 1977-11-12

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