JPS5076857A - - Google Patents
Info
- Publication number
- JPS5076857A JPS5076857A JP12472173A JP12472173A JPS5076857A JP S5076857 A JPS5076857 A JP S5076857A JP 12472173 A JP12472173 A JP 12472173A JP 12472173 A JP12472173 A JP 12472173A JP S5076857 A JPS5076857 A JP S5076857A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12472173A JPS5076857A (pt) | 1973-11-05 | 1973-11-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12472173A JPS5076857A (pt) | 1973-11-05 | 1973-11-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5076857A true JPS5076857A (pt) | 1975-06-23 |
Family
ID=14892445
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12472173A Pending JPS5076857A (pt) | 1973-11-05 | 1973-11-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5076857A (pt) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5385877U (pt) * | 1976-12-17 | 1978-07-14 | ||
| JP2014517155A (ja) * | 2011-06-24 | 2014-07-17 | エーシーエム リサーチ （シャンハイ） インコーポレーテッド | 基板上に均一な金属膜を形成するための方法及び装置 |
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1973
- 1973-11-05 JP JP12472173A patent/JPS5076857A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5385877U (pt) * | 1976-12-17 | 1978-07-14 | ||
| JP2014517155A (ja) * | 2011-06-24 | 2014-07-17 | エーシーエム リサーチ （シャンハイ） インコーポレーテッド | 基板上に均一な金属膜を形成するための方法及び装置 |