JPS5075581A - - Google Patents
Info
- Publication number
- JPS5075581A JPS5075581A JP12533673A JP12533673A JPS5075581A JP S5075581 A JPS5075581 A JP S5075581A JP 12533673 A JP12533673 A JP 12533673A JP 12533673 A JP12533673 A JP 12533673A JP S5075581 A JPS5075581 A JP S5075581A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12533673A JPS5248592B2 (ja) | 1973-11-09 | 1973-11-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12533673A JPS5248592B2 (ja) | 1973-11-09 | 1973-11-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5075581A true JPS5075581A (ja) | 1975-06-20 |
| JPS5248592B2 JPS5248592B2 (ja) | 1977-12-10 |
Family
ID=14907577
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12533673A Expired JPS5248592B2 (ja) | 1973-11-09 | 1973-11-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5248592B2 (ja) |
-
1973
- 1973-11-09 JP JP12533673A patent/JPS5248592B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5248592B2 (ja) | 1977-12-10 |