JPS5075370A - - Google Patents

Info

Publication number
JPS5075370A
JPS5075370A JP12342873A JP12342873A JPS5075370A JP S5075370 A JPS5075370 A JP S5075370A JP 12342873 A JP12342873 A JP 12342873A JP 12342873 A JP12342873 A JP 12342873A JP S5075370 A JPS5075370 A JP S5075370A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12342873A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12342873A priority Critical patent/JPS5075370A/ja
Publication of JPS5075370A publication Critical patent/JPS5075370A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP12342873A 1973-11-05 1973-11-05 Pending JPS5075370A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12342873A JPS5075370A (zh) 1973-11-05 1973-11-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12342873A JPS5075370A (zh) 1973-11-05 1973-11-05

Publications (1)

Publication Number Publication Date
JPS5075370A true JPS5075370A (zh) 1975-06-20

Family

ID=14860309

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12342873A Pending JPS5075370A (zh) 1973-11-05 1973-11-05

Country Status (1)

Country Link
JP (1) JPS5075370A (zh)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7648782B2 (en) 2006-03-20 2010-01-19 Tokyo Electron Limited Ceramic coating member for semiconductor processing apparatus
US7767268B2 (en) 2005-09-08 2010-08-03 Tocalo Co., Ltd. Spray-coated member having an excellent resistance to plasma erosion and method of producing the same
US7850864B2 (en) 2006-03-20 2010-12-14 Tokyo Electron Limited Plasma treating apparatus and plasma treating method
US8231986B2 (en) 2005-08-22 2012-07-31 Tocalo Co., Ltd. Spray coating member having excellent injury resistance and so on and method for producing the same

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8231986B2 (en) 2005-08-22 2012-07-31 Tocalo Co., Ltd. Spray coating member having excellent injury resistance and so on and method for producing the same
US7767268B2 (en) 2005-09-08 2010-08-03 Tocalo Co., Ltd. Spray-coated member having an excellent resistance to plasma erosion and method of producing the same
US8053058B2 (en) 2005-09-08 2011-11-08 Tocalo Co., Ltd. Spray-coated member having an excellent resistance to plasma erosion and method of producing the same
US7648782B2 (en) 2006-03-20 2010-01-19 Tokyo Electron Limited Ceramic coating member for semiconductor processing apparatus
US7850864B2 (en) 2006-03-20 2010-12-14 Tokyo Electron Limited Plasma treating apparatus and plasma treating method

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