JPS5075178A - - Google Patents

Info

Publication number
JPS5075178A
JPS5075178A JP48123974A JP12397473A JPS5075178A JP S5075178 A JPS5075178 A JP S5075178A JP 48123974 A JP48123974 A JP 48123974A JP 12397473 A JP12397473 A JP 12397473A JP S5075178 A JPS5075178 A JP S5075178A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48123974A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48123974A priority Critical patent/JPS5075178A/ja
Publication of JPS5075178A publication Critical patent/JPS5075178A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Carbon And Carbon Compounds (AREA)
  • Physical Vapour Deposition (AREA)
JP48123974A 1973-11-06 1973-11-06 Pending JPS5075178A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48123974A JPS5075178A (ja) 1973-11-06 1973-11-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48123974A JPS5075178A (ja) 1973-11-06 1973-11-06

Publications (1)

Publication Number Publication Date
JPS5075178A true JPS5075178A (ja) 1975-06-20

Family

ID=14873904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48123974A Pending JPS5075178A (ja) 1973-11-06 1973-11-06

Country Status (1)

Country Link
JP (1) JPS5075178A (ja)

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