JPS5073277A - - Google Patents

Info

Publication number
JPS5073277A
JPS5073277A JP12380273A JP12380273A JPS5073277A JP S5073277 A JPS5073277 A JP S5073277A JP 12380273 A JP12380273 A JP 12380273A JP 12380273 A JP12380273 A JP 12380273A JP S5073277 A JPS5073277 A JP S5073277A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12380273A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12380273A priority Critical patent/JPS5073277A/ja
Publication of JPS5073277A publication Critical patent/JPS5073277A/ja
Pending legal-status Critical Current

Links

JP12380273A 1973-11-02 1973-11-02 Pending JPS5073277A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12380273A JPS5073277A (ja) 1973-11-02 1973-11-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12380273A JPS5073277A (ja) 1973-11-02 1973-11-02

Publications (1)

Publication Number Publication Date
JPS5073277A true JPS5073277A (ja) 1975-06-17

Family

ID=14869665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12380273A Pending JPS5073277A (ja) 1973-11-02 1973-11-02

Country Status (1)

Country Link
JP (1) JPS5073277A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014134138A (ja) * 2013-01-10 2014-07-24 Shimadzu Corp ターボ分子ポンプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014134138A (ja) * 2013-01-10 2014-07-24 Shimadzu Corp ターボ分子ポンプ

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