JPS5070298A - - Google Patents
Info
- Publication number
- JPS5070298A JPS5070298A JP12098873A JP12098873A JPS5070298A JP S5070298 A JPS5070298 A JP S5070298A JP 12098873 A JP12098873 A JP 12098873A JP 12098873 A JP12098873 A JP 12098873A JP S5070298 A JPS5070298 A JP S5070298A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Oxygen, Ozone, And Oxides In General (AREA)
- Chemical Vapour Deposition (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12098873A JPS5070298A (ja) | 1973-10-27 | 1973-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12098873A JPS5070298A (ja) | 1973-10-27 | 1973-10-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5070298A true JPS5070298A (ja) | 1975-06-11 |
Family
ID=14799989
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12098873A Pending JPS5070298A (ja) | 1973-10-27 | 1973-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5070298A (ja) |
-
1973
- 1973-10-27 JP JP12098873A patent/JPS5070298A/ja active Pending