JPS5068976A - - Google Patents
Info
- Publication number
- JPS5068976A JPS5068976A JP6804074A JP6804074A JPS5068976A JP S5068976 A JPS5068976 A JP S5068976A JP 6804074 A JP6804074 A JP 6804074A JP 6804074 A JP6804074 A JP 6804074A JP S5068976 A JPS5068976 A JP S5068976A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19732330790 DE2330790A1 (de) | 1973-06-16 | 1973-06-16 | Vakuumaufdampfvorrichtung mit elektronenstrahlverdampfer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5068976A true JPS5068976A (ja) | 1975-06-09 |
Family
ID=5884246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6804074A Pending JPS5068976A (ja) | 1973-06-16 | 1974-06-14 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5068976A (ja) |
| DE (1) | DE2330790A1 (ja) |
| FR (1) | FR2233416A1 (ja) |
| IT (1) | IT1015074B (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63266065A (ja) * | 1987-04-23 | 1988-11-02 | Jeol Ltd | 膜作成装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3467057A (en) * | 1966-07-27 | 1969-09-16 | Hitachi Ltd | Electron beam evaporator |
-
1973
- 1973-06-16 DE DE19732330790 patent/DE2330790A1/de active Pending
-
1974
- 1974-06-14 JP JP6804074A patent/JPS5068976A/ja active Pending
- 1974-06-14 IT IT2399274A patent/IT1015074B/it active
- 1974-06-14 FR FR7420805A patent/FR2233416A1/fr active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63266065A (ja) * | 1987-04-23 | 1988-11-02 | Jeol Ltd | 膜作成装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2330790A1 (de) | 1975-01-09 |
| FR2233416B1 (ja) | 1978-01-13 |
| FR2233416A1 (en) | 1975-01-10 |
| IT1015074B (it) | 1977-05-10 |