JPS5068662A - - Google Patents
Info
- Publication number
- JPS5068662A JPS5068662A JP48117724A JP11772473A JPS5068662A JP S5068662 A JPS5068662 A JP S5068662A JP 48117724 A JP48117724 A JP 48117724A JP 11772473 A JP11772473 A JP 11772473A JP S5068662 A JPS5068662 A JP S5068662A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48117724A JPS5068662A (zh) | 1973-10-19 | 1973-10-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48117724A JPS5068662A (zh) | 1973-10-19 | 1973-10-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5068662A true JPS5068662A (zh) | 1975-06-09 |
Family
ID=14718704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48117724A Pending JPS5068662A (zh) | 1973-10-19 | 1973-10-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5068662A (zh) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5231585Y2 (zh) * | 1972-12-01 | 1977-07-19 | ||
| JPS5247867Y2 (zh) * | 1972-07-13 | 1977-10-31 |
-
1973
- 1973-10-19 JP JP48117724A patent/JPS5068662A/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5247867Y2 (zh) * | 1972-07-13 | 1977-10-31 | ||
| JPS5231585Y2 (zh) * | 1972-12-01 | 1977-07-19 |