JPS5068656U - - Google Patents

Info

Publication number
JPS5068656U
JPS5068656U JP12513573U JP12513573U JPS5068656U JP S5068656 U JPS5068656 U JP S5068656U JP 12513573 U JP12513573 U JP 12513573U JP 12513573 U JP12513573 U JP 12513573U JP S5068656 U JPS5068656 U JP S5068656U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12513573U
Other versions
JPS53617Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12513573U priority Critical patent/JPS53617Y2/ja
Publication of JPS5068656U publication Critical patent/JPS5068656U/ja
Application granted granted Critical
Publication of JPS53617Y2 publication Critical patent/JPS53617Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP12513573U 1973-10-29 1973-10-29 Expired JPS53617Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12513573U JPS53617Y2 (ja) 1973-10-29 1973-10-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12513573U JPS53617Y2 (ja) 1973-10-29 1973-10-29

Publications (2)

Publication Number Publication Date
JPS5068656U true JPS5068656U (ja) 1975-06-19
JPS53617Y2 JPS53617Y2 (ja) 1978-01-10

Family

ID=28375018

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12513573U Expired JPS53617Y2 (ja) 1973-10-29 1973-10-29

Country Status (1)

Country Link
JP (1) JPS53617Y2 (ja)

Also Published As

Publication number Publication date
JPS53617Y2 (ja) 1978-01-10

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