JPS5068546A - - Google Patents

Info

Publication number
JPS5068546A
JPS5068546A JP11874873A JP11874873A JPS5068546A JP S5068546 A JPS5068546 A JP S5068546A JP 11874873 A JP11874873 A JP 11874873A JP 11874873 A JP11874873 A JP 11874873A JP S5068546 A JPS5068546 A JP S5068546A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11874873A
Other languages
Japanese (ja)
Other versions
JPS5323172B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11874873A priority Critical patent/JPS5323172B2/ja
Publication of JPS5068546A publication Critical patent/JPS5068546A/ja
Publication of JPS5323172B2 publication Critical patent/JPS5323172B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP11874873A 1973-10-22 1973-10-22 Expired JPS5323172B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11874873A JPS5323172B2 (enrdf_load_stackoverflow) 1973-10-22 1973-10-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11874873A JPS5323172B2 (enrdf_load_stackoverflow) 1973-10-22 1973-10-22

Publications (2)

Publication Number Publication Date
JPS5068546A true JPS5068546A (enrdf_load_stackoverflow) 1975-06-07
JPS5323172B2 JPS5323172B2 (enrdf_load_stackoverflow) 1978-07-13

Family

ID=14744066

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11874873A Expired JPS5323172B2 (enrdf_load_stackoverflow) 1973-10-22 1973-10-22

Country Status (1)

Country Link
JP (1) JPS5323172B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6128805A (ja) * 1984-07-20 1986-02-08 Toho Denshi Kogyo Kk 微細幅測定方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5531496U (enrdf_load_stackoverflow) * 1978-08-22 1980-02-29

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6128805A (ja) * 1984-07-20 1986-02-08 Toho Denshi Kogyo Kk 微細幅測定方法

Also Published As

Publication number Publication date
JPS5323172B2 (enrdf_load_stackoverflow) 1978-07-13

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